Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11784029 | Method and apparatus for atomic layer etching | Sang Jun Park, Byung Chul Cho, Jun Hyuck Kwon, Jong Ki An, Tian Hao Han | 2023-10-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11784029 | Method and apparatus for atomic layer etching | Sang Jun Park, Byung Chul Cho, Jun Hyuck Kwon, Jong Ki An, Tian Hao Han | 2023-10-10 |