Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11769681 | Transfer robot and substrate processing apparatus having the same | Kyung Hee Jeon, Dong Sun Ko | 2023-09-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11769681 | Transfer robot and substrate processing apparatus having the same | Kyung Hee Jeon, Dong Sun Ko | 2023-09-26 |