Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11718912 | Methods and apparatus for calibrating concentration sensors for precursor delivery | Elaina Babayan, Weize Hu | 2023-08-08 |
| 11718914 | Techniques for controlling precursors in chemical deposition processes | Elaina Babayan, Vijay Venugopal, Jonathan Bakke | 2023-08-08 |