Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11664193 | Temperature controlled/electrically biased wafer surround | Simon Ruffell, Kevin Verrier | 2023-05-30 |
| 11646213 | Multi-zone platen temperature control | Simon Ruffell | 2023-05-09 |
| 11640909 | Techniques and apparatus for unidirectional hole elongation using angled ion beams | Simon Ruffell | 2023-05-02 |