Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11822258 | Foil trap and light source apparatus including the same | — | 2023-11-21 |
| 11774856 | Extreme ultraviolet light source device | Hajime Kikuiri | 2023-10-03 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11822258 | Foil trap and light source apparatus including the same | — | 2023-11-21 |
| 11774856 | Extreme ultraviolet light source device | Hajime Kikuiri | 2023-10-03 |