Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11615961 | Method for ion implantation that adjusts a targets tilt angle based on a distribution of ejected ions from a target | Chun-Jung Huang, Li-Hsin Chu, Po-Feng Tsai, Kuang-Huan Hsu, Tsung Wei Chen +1 more | 2023-03-28 |