Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11835699 | Focusing device and EUV radiation generating device having same | Tolga Ergin | 2023-12-05 |
| 11675202 | Reflective optical element, beam guiding device and EUV-beam generating device | Tolga Ergin | 2023-06-13 |