Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11626290 | Method, device, and system for etching silicon oxide film | Osamu Yokoyama, Kwangpyo Choi, Kazuki Hashimoto, Takashi Kobayashi, Takashi Sakuma +1 more | 2023-04-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11626290 | Method, device, and system for etching silicon oxide film | Osamu Yokoyama, Kwangpyo Choi, Kazuki Hashimoto, Takashi Kobayashi, Takashi Sakuma +1 more | 2023-04-11 |