Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823863 | Ion implanter and model generation method | Tetsuya Kudo, Mikio Yamaguchi | 2023-11-21 |
| 11728132 | Ion implanter and ion implantation method | Mikio Yamaguchi, Tetsuya Kudo | 2023-08-15 |
| 11603590 | Ion implanter irradiating ion mean onto wafer and ion implantation method using the same | — | 2023-03-14 |