Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11686002 | Method for manufacturing ruthenium wiring | Yukihisa Wada, Shinya Koga, Kazuhiro Takahashi, Natsumi OKAWA | 2023-06-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11686002 | Method for manufacturing ruthenium wiring | Yukihisa Wada, Shinya Koga, Kazuhiro Takahashi, Natsumi OKAWA | 2023-06-27 |