Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11817321 | Plasma processing apparatus and plasma processing method | Ryo Terashima | 2023-11-14 |
| 11756769 | Plasma processing apparatus | Takashi Tohara, Naokazu Furuya, Yosuke Tamuro | 2023-09-12 |