Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11796460 | Absorbance analysis apparatus for DCR gas, absorbance analysis method for DCR gas, and absorbance analysis program recording medium on which program for DCR gas is recorded | Masayuki Tanaka, Yuhei SAKAGUCHI, Masakazu Minami, Toru Shimizu | 2023-10-24 |
| 11753720 | Film forming apparatus, source supply apparatus, and film forming method | Masayuki Tanaka | 2023-09-12 |