YK

Yosuke Kawabuchi

TL Tokyo Electron Limited: 1 patents #287 of 865Top 35%
Overall (2023): #194,127 of 537,848Top 40%
1
Patents 2023

Issued Patents 2023

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11854815 Substrate drying apparatus, substrate drying method and storage medium — 2023-12-26