Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11605712 | Fabrication process flow of dielectric layer for isolation of nano-sheet devices on bulk silicon substrate | Shimpei Yamaguchi, Atsushi Tsuboi, Atsushi Endo, Masaru Sugimoto, Hiroshi Yano +1 more | 2023-03-14 |