Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11781219 | Processing apparatus and processing method | Kazuo Yabe, Kazumasa Igarashi | 2023-10-10 |
| 11694890 | Substrate processing method and substrate processing apparatus | Kiwamu ITO, Keiko Hosoe | 2023-07-04 |