Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11569112 | Substrate processing apparatus and method of opening/closing lid of substrate accommodating vessel | Eiki Endo, Hiroyuki Takatsuka | 2023-01-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11569112 | Substrate processing apparatus and method of opening/closing lid of substrate accommodating vessel | Eiki Endo, Hiroyuki Takatsuka | 2023-01-31 |