TI

Takuya ITAHASHI

TL Tokyo Electron Limited: 1 patents #287 of 865Top 35%
Overall (2023): #236,636 of 537,848Top 45%
1
Patents 2023

Issued Patents 2023

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11691172 Liquid processing apparatus and liquid processing method Chikara Nobukuni, Tomoaki Ojima, Ryoichi Horiguchi, Shota WAKAYAMA 2023-07-04