TU

Takehiro Ueda

TL Tokyo Electron Limited: 2 patents #121 of 865Top 15%
Overall (2023): #102,850 of 537,848Top 20%
2
Patents 2023

Issued Patents 2023

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
11756808 Plasma processing apparatus 2023-09-12
11582854 Mounting table and charge neutralization method for target object 2023-02-14