Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11850743 | Transport apparatus, semiconductor manufacturing apparatus, and transport method | Toshiaki Kodama | 2023-12-26 |
| 11776831 | Substrate transport system and substrate transport method | — | 2023-10-03 |