TS

Takashi Sameshima

TL Tokyo Electron Limited: 1 patents #287 of 865Top 35%
Overall (2023): #234,256 of 537,848Top 45%
1
Patents 2023

Issued Patents 2023

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11802334 Tungsten film-forming method, film-forming system and storage medium Koji Maekawa, Katsumasa Yamaguchi 2023-10-31