SI

Shuji Iwanaga

TL Tokyo Electron Limited: 1 patents #287 of 865Top 35%
Overall (2023): #257,441 of 537,848Top 50%
1
Patents 2023

Issued Patents 2023

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11636585 Substrate defect inspection apparatus, substrate defect inspection method, and storage medium 2023-04-25