Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11798821 | Substrate processing apparatus, substrate processing method, and storage medium | Yukinobu OTSUKA, Yasuhiro Kuga, Koji Ushimaru, Ryohei FUJISE | 2023-10-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11798821 | Substrate processing apparatus, substrate processing method, and storage medium | Yukinobu OTSUKA, Yasuhiro Kuga, Koji Ushimaru, Ryohei FUJISE | 2023-10-24 |