Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11621177 | Plasma processing apparatus and calculation method | — | 2023-04-04 |
| 11594399 | Cleaning method and plasma processing apparatus | — | 2023-02-28 |
| 11557468 | Plasma processing apparatus, temperature control method, and temperature control program | — | 2023-01-17 |
| 11546970 | Plasma processing apparatus and temperature control method | — | 2023-01-03 |