Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11664249 | Substrate processing apparatus, substrate processing method, and recording medium | Seiichi KURE, Hideo Shite | 2023-05-30 |
| 11567444 | Developing treatment apparatus and developing treatment method | Hidenori Tosu, Takahiro Yamaguchi, Seiichi KURE | 2023-01-31 |