PA

Paul Abel

TL Tokyo Electron Limited: 2 patents #121 of 865Top 15%
🗺 Texas: #2,850 of 16,648 inventorsTop 20%
Overall (2023): #120,767 of 537,848Top 25%
2
Patents 2023

Issued Patents 2023

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
11820919 Ruthenium CMP chemistry based on halogenation 2023-11-21
11802342 Methods for wet atomic layer etching of ruthenium 2023-10-31