OM

Osamu Miyahara

TL Tokyo Electron Limited: 2 patents #121 of 865Top 15%
Overall (2023): #120,872 of 537,848Top 25%
2
Patents 2023

Issued Patents 2023

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
11850697 Substrate processing apparatus and substrate processing method — 2023-12-26
11731229 Substrate processing apparatus, substrate processing method, and storage medium — 2023-08-22