NI

Norihiro Itoh

TL Tokyo Electron Limited: 1 patents #287 of 865Top 35%
Overall (2023): #307,379 of 537,848Top 60%
1
Patents 2023

Issued Patents 2023

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11826794 Substrate cleaning apparatus, substrate cleaning method, and non-transitory computer-readable recording medium Yuki Ito 2023-11-28