Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11598007 | Substrate state determining apparatus, substrate processing apparatus, model generating apparatus, and substrate state determining method | Yuta Haga, Hiroyuki Sato, Motoi Okada, Kei Sano, Junya Sato +4 more | 2023-03-07 |