Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837487 | Transfer device, substrate processing system, transfer method and substrate processing method | Takeshi Tamura, Seiji Nakano | 2023-12-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837487 | Transfer device, substrate processing system, transfer method and substrate processing method | Takeshi Tamura, Seiji Nakano | 2023-12-05 |