MS

Masaki Sano

TL Tokyo Electron Limited: 1 patents #287 of 865Top 35%
Overall (2023): #334,951 of 537,848Top 65%
1
Patents 2023

Issued Patents 2023

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11840759 Method of forming tungsten film and system therefor Masafumi Takahashi, Kenji Suzuki, Tsuyoshi Takahashi 2023-12-12