Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11774298 | Multi-point thermocouples and assemblies for ceramic heating structures | Melvin Verbaas, Takashi Mochizuki, Takahisa Mase, Nobutaka Yoshioka, Saki Matsuo | 2023-10-03 |
| 11664266 | Substrate processing apparatus and substrate delivery method | Yuichiro WAGATSUMA, Tetsuya Saitou, Masahisa Watanabe | 2023-05-30 |