Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11554493 | Transfer apparatus | Shota Shimazaki | 2023-01-17 |
| 11545381 | Substrate transporting method and substrate processing system | — | 2023-01-03 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11554493 | Transfer apparatus | Shota Shimazaki | 2023-01-17 |
| 11545381 | Substrate transporting method and substrate processing system | — | 2023-01-03 |