Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11557493 | Substrate cleaning apparatus and substrate cleaning method | Toshimitsu Sakai | 2023-01-17 |
| 11548804 | Method and apparatus for processing oxygen-containing workpiece | Reiko SASAHARA, Yasuo Nakatani | 2023-01-10 |