Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11765879 | Substrate processing apparatus and monitoring method | — | 2023-09-19 |
| 11670999 | Magnetic coupling device | Akihiro Kimoto, Satoshi Yoshimoto, Norihiko Kishimoto, Keita Hayashi | 2023-06-06 |