Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11731145 | Multiple section showerhead assembly | Gregory Siu | 2023-08-22 |
| 11562891 | Method of temperature measurement used in radio-frequency processing apparatus for semiconductor | Ren Zhou | 2023-01-24 |