Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11705374 | Substrate processing method and substrate processing apparatus | Hidehiko Sato, Tomoyuki Kudoh, Hiroaki Mochizuki | 2023-07-18 |
| 11682543 | Plasma processing method and plasma processing apparatus | — | 2023-06-20 |