HS

Hideto Saito

TL Tokyo Electron Limited: 1 patents #287 of 865Top 35%
📍 Rifu, JP: #106 of 296 inventorsTop 40%
Overall (2023): #423,683 of 537,848Top 80%
1
Patents 2023

Issued Patents 2023

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11626818 Substrate processing apparatus, and temperature control method — 2023-04-11