Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11835278 | Temperature control medium processing apparatus and temperature control medium processing method | Takehiko Arita, Haruka Kaneko, Satoshi Suzuki | 2023-12-05 |
| 11817334 | Substrate processing apparatus and substrate processing method | Haruka Kaneko, Takehiko Arita | 2023-11-14 |