HI

Hachishiro Iizuka

TL Tokyo Electron Limited: 1 patents #287 of 865Top 35%
Overall (2023): #431,227 of 537,848Top 85%
1
Patents 2023

Issued Patents 2023

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11621151 Upper electrode and plasma processing apparatus — 2023-04-04