Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11738997 | Method and apparatus for producing halogen oxyacid solution | Takafumi SHIMODA, Akihiro Saito, Naoki Matsuda, Kenichi KAKIZONO, Takeshi Kawano +1 more | 2023-08-29 |
| 11674230 | Treatment liquid for semiconductor with ruthenium and method of producing the same | Tomoaki Sato, Yuki KIKKAWA, Takafumi SHIMODA | 2023-06-13 |
| 11572331 | Quaternary alkyl ammonium hypochlorite solution, method of producing the same, and method for processing semiconductor wafers | Takafumi SHIMODA, Yuki KIKKAWA, Tomoaki Sato | 2023-02-07 |
| 11572533 | Quaternary alkylammonium hypochlorite solution, method for manufacturing same, and method for cleaning semiconductor wafer | Takafumi SHIMODA, Yuki KIKKAWA, Seiji Tono | 2023-02-07 |