Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11694893 | Semiconductor manufacturing parts comprising SiC deposition layer, and manufacturing method therefor | Ki-Won Kim, Jong Hyun Kim | 2023-07-04 |
| 11591227 | SiC material and SiC composite material | — | 2023-02-28 |