Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11815822 | Electrodeposition compatible anti-reflection coatings for laser interference lithography applications | Shailesh N. Joshi, Gaurav Singhal, Paul V. Braun, Nenad Miljkovic | 2023-11-14 |
| 11726236 | Graded pore structure without phase mask | Shailesh N. Joshi, Gaurav Singhal, Paul V. Braun, Danny J. Lohan | 2023-08-15 |