Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11694920 | Substrate support device, thermal processing apparatus, substrate support method, and thermal processing method | — | 2023-07-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11694920 | Substrate support device, thermal processing apparatus, substrate support method, and thermal processing method | — | 2023-07-04 |