Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11767218 | Microelectromechanical capacitive pressure sensor having a valve portion being operable to close first output and open second output to equalize pressure | Tapio Pernu, Jukka Kyynäräinen | 2023-09-26 |
| 11697586 | Surface micromechanical element and method for manufacturing the same | Aarne Oja | 2023-07-11 |