Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11802757 | Heterodyne grating interferometric method and system for two-degree-of-freedom with high alignment tolerance | Pengcheng Hu, Jiubin Tan | 2023-10-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11802757 | Heterodyne grating interferometric method and system for two-degree-of-freedom with high alignment tolerance | Pengcheng Hu, Jiubin Tan | 2023-10-31 |