Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11551958 | Apparatus and method for transferring wafers | Chung-Hsung Yang | 2023-01-10 |
| 11551959 | System and method for automated wafer carrier handling | Chung-Hsung Yang | 2023-01-10 |