Issued Patents 2023
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11846880 | Extreme ultraviolet mask and method for forming the same | — | 2023-12-19 |
| 11789355 | Extreme ultraviolet mask and method of manufacturing the same | — | 2023-10-17 |
| 11782339 | Pellicle for an EUV lithography mask and a method of manufacturing thereof | — | 2023-10-10 |
| 11762282 | Pellicle design for mask | — | 2023-09-19 |
| 11740549 | Extreme ultraviolet lithography method, extreme ultraviolet mask and formation method thereof | — | 2023-08-29 |
| 11662661 | EUV pellicle with structured ventilation frame | — | 2023-05-30 |
| 11656544 | Robust, high transmission pellicle for extreme ultraviolet lithography systems | — | 2023-05-23 |