Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11827970 | Shutter disc for a semiconductor processing tool | Chin-Szu Lee, Hua-Sheng Chiu, Yi-Chao Chang, Zih-Shou MUE | 2023-11-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11827970 | Shutter disc for a semiconductor processing tool | Chin-Szu Lee, Hua-Sheng Chiu, Yi-Chao Chang, Zih-Shou MUE | 2023-11-28 |