Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11557470 | Sputtering target assembly to prevent overetch of backing plate and methods of using the same | Chen-Fang Chung, Wen-Cheng Cheng, Po-Wen Yang, Ming-Jie He, Cheng-Yi Teng | 2023-01-17 |