Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11569071 | Cover ring and ground shield for physical vapor deposition chamber | Sheng-Ying WU, Ming-Hsien Lin | 2023-01-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11569071 | Cover ring and ground shield for physical vapor deposition chamber | Sheng-Ying WU, Ming-Hsien Lin | 2023-01-31 |